Multi-Bessel Beams Generated by an Axicon and a Spatial Light Modulator for Drilling Applications

被引:11
|
作者
Lutz, Christian [1 ]
Schwarz, Simon [1 ]
Marx, Jan [2 ]
Esen, Cemal [2 ]
Hellmann, Ralf [1 ]
机构
[1] Univ Appl Sci Aschaffenburg, Appl Laser & Photon Grp, Wurzburgerstr 45, D-63743 Aschaffenburg, Germany
[2] Ruhr Univ Bochum, Appl Laser Technol, Univ Str 150, D-44801 Bochum, Germany
关键词
Bessel beam; axicon; optical system; ultrashort pulsed laser; material ablation; NONDIFFRACTING BEAMS; DIFFRACTION; FABRICATION; ARRAYS;
D O I
10.3390/photonics10040413
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We report on an optical setup to generate multi-Bessel beam profiles combining a refractive axicon and a spatial light modulator. Based on their particular beam profile, Bessel beams offer advantageous properties for micro drilling processes and internal volume processing, especially for transparent materials. In addition, the laser power of industrial, ultrashort pulsed lasers has increased significantly over the last few years, offering the possibility for highly efficient processes using multi-spot profiles. Our optical concept combines the dynamic possibilities of beam splitting using a spatial light modulator with the benefits of Bessel beams, which facilitates multi-Bessel beam processing. Beside the simulation and experimental evaluation of the generated multi-Bessel beams, we exemplify the applicability of the developed module for the perforation of thin metal foils by micro drilling.
引用
收藏
页数:9
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