An electrostatic micromotor based on electrets

被引:0
|
作者
Chen, Gangjin [1 ]
Zhang, Jianfeng [1 ]
Fan, Zhankui [1 ]
Gao, Xiaoli [1 ]
Ye, Yanming [1 ]
机构
[1] Hangzhou Dianzi Univ, Informat Engn Sch, Lab Electret & its Applicat, Hangzhou, Peoples R China
关键词
dielectric thin films; electric fields; polymer films; DESIGN; VOLTAGE; DRIVEN;
D O I
10.1049/nde2.12059
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The authors report a novel electret-based miniature electrostatic motor with an electret film as the stator and a metal electrode as the rotor. A particular commutator is used to transform the polarity of the metal electrode. When the size of the electret-based electrostatic motor (EEM) is 42 x 44 x 15 mm(3), the maximum power consumption is only 5.4 mW. The rotation speed of the EEM increases with the increase of the supply voltage, and the maximum rotation speed can reach up to 2864 rpm. Powered by two nickel-hydride batteries with a rated capacity of 1700 mAh, the EEM can drive a fan with a diameter of 40 mm to rotate continuously for 18 h. The EEM has the characteristics of low power consumption and convenient fabrication. Experimental results show that the EEM demonstrates high reliability and has potential applications in micro-electromechanical systems.
引用
收藏
页码:276 / 281
页数:6
相关论文
共 50 条
  • [1] Electrostatic micromotor based on ferroelectric ceramics
    Baginsky, IL
    Kostsov, EG
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2004, 14 (11) : 1569 - 1575
  • [2] The electrostatic ultrasonic micromotor
    Danel, JS
    Charvet, P
    Robert, P
    Villard, P
    TRANSDUCERS 97 - 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 1997, : 53 - 56
  • [3] The electrostatic ultrasonic micromotor
    Robert, P
    Danel, JS
    Villard, P
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 1997, 7 (03) : 170 - 172
  • [4] ELECTRETS AND ELECTROSTATIC MEASUREMENT
    VARNEY, RN
    HAHN, HT
    AMERICAN JOURNAL OF PHYSICS, 1975, 43 (06) : 509 - 513
  • [5] Electrostatic micromotor and its reliability
    Zhang, WM
    Meng, G
    Li, HG
    MICROELECTRONICS RELIABILITY, 2005, 45 (7-8) : 1230 - 1242
  • [6] Electrostatic microdischarges on the surface of electrets
    Ficker, T
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2005, 38 (03) : 483 - 489
  • [7] Design Optimization of Polysilicon Electrostatic Micromotor Based on Genetic Algorithm
    Lin, Zhi-Wei
    Li, Jun
    Zhang, Bai-Hai
    Di, Xin
    ICIC 2009: SECOND INTERNATIONAL CONFERENCE ON INFORMATION AND COMPUTING SCIENCE, VOL 3, PROCEEDINGS, 2009, : 130 - 133
  • [8] COUPLED ELECTROSTATIC AND MECHANICAL FEA OF A MICROMOTOR
    BEERSCHWINGER, U
    MILNE, NG
    YANG, SJ
    REUBEN, RL
    SANGSTER, AJ
    ZIAD, H
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 1994, 3 (04) : 162 - 171
  • [9] Analysis and Modeling of an Electrostatic Induction Micromotor
    Santana Martin, F. J.
    Garcia-Alonso Montoya, S.
    Monzon Verona, J. M.
    Montiel-Nelson, J. A.
    ICEM: 2008 INTERNATIONAL CONFERENCE ON ELECTRICAL MACHINES, VOLS 1- 4, 2009, : 1902 - +
  • [10] High level simulation of an electrostatic micromotor
    Endemaño, A
    Dunnigan, M
    Desmulliez, MPY
    MEMS DESIGN, FABRICATION, CHARACTERIZATION, AND PACKAGING, 2001, 4407 : 337 - 348