Three-dimensional, time-dependent simulation of tapered EUV FELs with phase shifters

被引：0
|
作者：
Kalitenko, A. M. [1 ]
机构：
[1] Moscow MV Lomonosov State Univ, Fac Phys, Dept Theoret Phys, Moscow 119991, Russia
来源：
PHYSICA SCRIPTA | 2024年 / 99卷 / 04期
关键词：
free-electron laser; EUV lithography; tapering; phase shift; SASE FEL;
D O I：
10.1088/1402-4896/ad2f8d
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
In this article, we have developed and evaluated a method for obtaining extreme ultraviolet (EUV) radiation by amplifying the third harmonic of the free-electron laser (FEL) radiation using phase shifters and tapering. Simulations of self-amplified spontaneous emission (SASE) FELs and seeding schemes are presented. We have demonstrated that the combination of phase shifts and tapering results in a more efficient technique that reduces electron beam energy by half. The stability of the scheme in relation to phase shift errors has been analyzed, and the implementation of the method has been discussed. The proposed FEL design enables a decrease in facility energy and a reduction in the cost of both new and existing projects in the EUV band.
引用
收藏
页数：7
相关论文
共 50 条
  • [1] FAST: A three-dimensional time-dependent FEL simulation code
    Saldin, E.L.
    Schneidmiller, E.A.
    Yurkov, M.V.
    Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1999, 429 (01): : 233 - 237
  • [2] FAST: a three-dimensional time-dependent FEL simulation code
    Saldin, EL
    Schneidmiller, EA
    Yurkov, MV
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1999, 429 (1-3): : 233 - 237
  • [3] FAST: a three-dimensional time-dependent FEL simulation code
    Saldin, EL
    Schneidmiller, EA
    Yurkov, MV
    FREE ELECTRON LASERS 1998, 1999, : 233 - 237
  • [4] Three-dimensional computer simulation of time-dependent skeletal structure evolution during liquid phase sintering
    University of Nish, Faculty of Electronic Engineering, Department of Microelectronics, PO Box 73, 18000 Nish, Serbia
    不详
    不详
    IOP Conf. Ser. Mater. Sci. Eng., SYMPOSIUM 1
  • [5] Time-Dependent, Three-Dimensional Simulation of Free-Electron-Laser Oscillators
    van der Slot, P. J. M.
    Freund, H. P.
    Miner, W. H., Jr.
    Benson, S. V.
    Shinn, M.
    Boller, K. -J.
    PHYSICAL REVIEW LETTERS, 2009, 102 (24)
  • [6] Three-dimensional time-dependent numerical simulation of a quiescent carbon combustion in air
    Yi, Fuxing
    Fan, Jianren
    Li, Debo
    Lu, Shuqiang
    Luo, Kun
    FUEL, 2011, 90 (04) : 1522 - 1528
  • [7] A time-dependent, three-dimensional neutron transport methodology
    Goluoglu, S
    Dodds, HL
    NUCLEAR SCIENCE AND ENGINEERING, 2001, 139 (03) : 248 - 261
  • [8] A THREE-DIMENSIONAL TIME-DEPENDENT MODEL ON COASTAL UPWELLING
    李永祥
    胡敦欣
    ChineseJournalofOceanologyandLimnology, 1989, (03) : 251 - 261
  • [9] Three-dimensional, time-dependent simulation of a regenerative amplifier free-electron laser
    Freund, H. P.
    Nguyen, D. C.
    Sprangle, P. A.
    van der Slot, P. J. M.
    PHYSICAL REVIEW SPECIAL TOPICS-ACCELERATORS AND BEAMS, 2013, 16 (01):
  • [10] Time-dependent fluorescence depolarization analysis in three-dimensional microspectroscopy
    Koshioka, Masanori
    Sasaki, Keiji
    Masuhara, Hiroshi
    Applied Spectroscopy, 49 (02):
12345