[1] Guangdong Univ Technol, Sch Phys & Photoelect Engn, Guangzhou 510650, Peoples R China
[2] Foshan Univ, Sch Phys & Optoelect Engn, Guangdong Hong Kong Macao Joint Lab Intelligent Mi, Foshan 528000, Peoples R China
[3] Peking Univ, Inst Microelect, Sch Elect Engn & Comp Sci, Natl Key Lab Sci & Technol Micro Nano Fabricat, Beijing 100871, Peoples R China
[4] Univ Shanghai Sci & Technol, Inst Energy Mat Sci IEMS, Shanghai 200093, Peoples R China
[5] Nanjing kLIGHT Laser Technol Co Ltd, Nanjing 210032, Jiangsu, Peoples R China