Magnetic field observation in a magnetic tunnel junction by scanning transmission electron microscopy

被引：1
|
作者：
Kohno, Yuji [1 ]
Seki, Takehito [2 ,3 ]
Tsuruoka, Shun [4 ]
Ohya, Shinobu [4 ,5 ,6 ]
Shibata, Naoya [1 ,2 ,7 ]
机构：
[1] JEOL Ltd, 3-1-2 Musashino, Akishima, Tokyo 1968558, Japan
[2] Univ Tokyo, Inst Engn Innovat, Sch Engn, Yayoi 2-11-16,Bunkyo Ku, Tokyo 1138656, Japan
[3] Japan Sci & Technol Agcy, PRESTO, Honcho 4-1-8, Kawaguchi, Saitama 3320012, Japan
[4] Univ Tokyo, Sch Engn, Dept Elect Engn & Informat Syst, 7-3-1 Hongo,Bunkyo Ku, Tokyo 1138656, Japan
[5] Univ Tokyo, Sch Engn, Ctr Spintron Res Network CSRN, 7-3-1 Hongo,Bunkyo Ku, Tokyo 1138656, Japan
[6] Univ Tokyo, Inst Nano Quantum Informat Elect NanoQuine, 4-6-1 Komaba,Meguro Ku, Tokyo 1538505, Japan
[7] Japan Fine Ceram Ctr, Nanostruct Res Lab, 2-4-1 Mutsuno,Atsuta Ku, Nagoya, Aichi 4568587, Japan
来源：
MICROSCOPY | 2024年 / 73卷 / 04期
关键词：
DPC STEM; MTJ; magnetoresistive random-access memory; tilt scan; tDPC; DIFFERENTIAL-PHASE-CONTRAST; ROOM-TEMPERATURE; LARGE MAGNETORESISTANCE;
D O I：
10.1093/jmicro/dfad063
中图分类号：
TH742 [显微镜];
学科分类号：
摘要：
A magnetic tunnel junction (MTJ) consists of two ferromagnetic layers separated by a thin insulating layer. MTJs show tunnel magnetoresistance effect, where the resistance in the direction perpendicular to the insulator layer drastically changes depending on the magnetization directions (parallel or antiparallel) in the ferromagnetic layers. However, direct observation of local magnetizations inside MTJs has been challenging. In this study, we demonstrate direct observation of magnetic flux density distribution inside epitaxially grown Fe/MgO/Fe layers using differential phase contrast scanning transmission electron microscopy. By utilizing newly developed tilt-scan averaging system for suppressing diffraction contrasts, we clearly visualize parallel and antiparallel states of ferromagnetic layers at nanometer resolution.
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页码：329 / 334
页数：6
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