Double-sided Row Hammer Effect in Sub-20 nm DRAM: Physical Mechanism, Key Features and Mitigation

被引:11
|
作者
Zhou, Longda [1 ,2 ,3 ]
Li, Jie [1 ,2 ,3 ]
Qiao, Zheng [1 ,2 ,3 ]
Ren, Pengpeng [1 ,2 ,3 ]
Sun, Zixuan [4 ]
Wang, Jianping [5 ]
Wu, Blacksmith [5 ]
Ji, Zhigang [1 ,2 ,3 ,6 ]
Wang, Runsheng [4 ,6 ]
Cao, Kanyu [5 ]
Huang, Ru [4 ]
机构
[1] Shanghai Jiao Tong Univ, Natl Key Lab Sci & Technol Micro Nano Fabricat, Shanghai, Peoples R China
[2] Peking Univ, Beijing, Peoples R China
[3] Shanghai Jiao Tong Univ, Dept Micro Nano Elect, SEIEE, Shanghai 200240, Peoples R China
[4] Peking Univ, Sch Integrated Circuit, Beijing 100871, Peoples R China
[5] ChangXin Memory Technol, Hefei 230601, Peoples R China
[6] Beijing Superstring Acad Memory Technol, Beijing 100176, Peoples R China
基金
中国国家自然科学基金;
关键词
Capacitive crosstalk; DRAM; process dependence; row hammer effect; trap-assisted electron migration;
D O I
10.1109/IRPS48203.2023.10117677
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The double-sided row hammer (rh) effect at the silicon level for sub-20 nm dynamic random access memory (DRAM) is systematically investigated for the first time. Based on 3D TCAD simulation, the impacts of capacitive crosstalk and electron migration are investigated. The latter with trap assistance is found the dominant mechanism behind the enhancement of 1 failure and the alleviation of 0 failure for double-sided rh. Moreover, rh dependences on data pattern, timing parameters and technology nodes are compared under different rh conditions. A trade-off of retention time (tret) between 1 failure and 0 failure should be considered when suppressing the double-sided rh effect. With the co-optimization of key process parameters, tret for double-sided rh-induced 1 failure can be improved by 220 times.
引用
收藏
页数:10
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