Identifying, Resolving, and Quantifying Anisotropy in ReS2 Nanomechanical Resonators

被引:18
|
作者
Xu, Bo [1 ]
Zhu, Jiankai [1 ]
Xiao, Fei [1 ]
Jiao, Chenyin [1 ]
Liang, Yachun [1 ]
Wen, Ting [1 ]
Wu, Song [1 ]
Zhang, Zejuan [1 ]
Lin, Lin [3 ]
Pei, Shenghai [1 ]
Jia, Hao [2 ]
Chen, Ying [2 ]
Ren, Ziming [4 ]
Wei, Xueyong [4 ]
Huang, Wen [3 ]
Xia, Juan [1 ]
Wang, Zenghui [1 ,5 ]
机构
[1] Univ Elect Sci & Technol China, Inst Fundamental & Frontier Sci, Chengdu 610054, Peoples R China
[2] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China
[3] Univ Elect Sci & Technol China, Yangtze Delta Reg Inst Huzhou, Huzhou 313001, Peoples R China
[4] Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Peoples R China
[5] Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Device, Chengdu 610054, Peoples R China
基金
中国国家自然科学基金;
关键词
anisotropy; mechanical properties; mode shapes; nanomechanical resonator; ReS2; FIELD-EFFECT TRANSISTORS; FEW-LAYER RES2; BLACK PHOSPHORUS; SILICON;
D O I
10.1002/smll.202300631
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
As an emerging two-dimensional semiconductor, rhenium disulfide (ReS2) is renowned for its strong in-plane anisotropy in electrical, optical, and thermal properties. In contrast to the electrical, optical, optoelectrical, and thermal anisotropies that are extensively studied in ReS2, experimental characterization of mechanical properties has largely remained elusive. Here, it is demonstrated that the dynamic response in ReS2 nanomechanical resonators can be leveraged to unambiguously resolve such disputes. Using anisotropic modal analysis, the parameter space for ReS2 resonators in which mechanical anisotropy is best manifested in resonant responses is determined. By measuring their dynamic response in both spectral and spatial domains using resonant nanomechanical spectromicroscopy, it is clearly shown that ReS2 crystal is mechanically anisotropic. Through fitting numerical models to experimental results, it is quantitatively determined that the in-plane Young's moduli are 127 and 201 GPa along the two orthogonal mechanical axes. In combination with polarized reflectance measurements, it is shown that the mechanical soft axis aligns with the Re-Re chain in the ReS2 crystal. These results demonstrate that dynamic responses in nanomechanical devices can offer important insights into intrinsic properties in 2D crystals and provide design guidelines for future nanodevices with anisotropic resonant responses.
引用
收藏
页数:9
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