Gigahertz Phononic Integrated Circuits Based on Overlay Slot Waveguides

被引:4
|
作者
Feng, Ziyao [1 ]
Liu, Yang [2 ]
Xi, Xiang [1 ]
Wang, Lai [2 ]
Sun, Xiankai [1 ]
机构
[1] Chinese Univ Hong Kong, Dept Elect Engn, Shatin, Hong Kong, Peoples R China
[2] Tsinghua Univ, Beijing Natl Res Ctr Informat Sci & Technol BNRist, Dept Elect Engn, Beijing 100084, Peoples R China
关键词
Cladding layer - Electronic elements - Fabrication process - Optoelectronic integration - Photonic elements - Piezoelectric layers - Power splitting - Property - Sapphire substrates - Slot waveguide;
D O I
10.1103/PhysRevApplied.19.064076
中图分类号
O59 [应用物理学];
学科分类号
摘要
Harnessing the properties of phonons on a chip, phononic integrated circuits are playing an increasingly important role in optoelectronic integration. To date, most of such phononic waveguides are realized by etching a piezoelectric layer and forming a wire, which not only involves complicated fabrication processes but also limits integration with electronic and photonic elements on the same chip. To overcome these difficulties, here we propose and demonstrate a type of overlay slot phononic waveguide obtained by patterning a thin silicon cladding layer on an unetched gallium-nitride-on-sapphire substrate. We experimentally demonstrate the guiding and power splitting of gigahertz surface acoustic waves in such waveguides, with a measured propagation loss of about 1.80 dB/mm for the Rayleigh mode. We also theoretically predict that the Love mode in such waveguides can turn into a phononic bound state in the continuum under special conditions. Such waveguides introduce an alternative paradigm for phononic integrated circuitry and will enable applications in information processing, environmental monitoring, and noninvasive manipulation of biomolecules on a chip.
引用
收藏
页数:9
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