共 50 条
- [2] Effect of chemical action on the chemical mechanical polishing of β-Ga2O3(100) substrate PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2019, 56 : 184 - 190
- [4] Effect of OH- on chemical mechanical polishing of β-Ga2O3(100) substrate using an alkaline slurry RSC ADVANCES, 2018, 8 (12): : 6544 - 6550
- [5] Assessment of the (010) β-Ga2O3 surface and substrate specification JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2021, 39 (01):
- [10] β-(AlxGa1-x)2O3/Ga2O3 (010) heterostructures grown on β-Ga2O3 (010) substrates by plasma-assisted molecular beam epitaxy JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2015, 33 (04):