High Precision and Large Dynamic Range Measurement of Laser Triangulation Displacement Sensor Using Diffraction Grating

被引:0
|
作者
Yang, Yanrong [1 ,5 ,6 ]
Chen, Xuehua [2 ]
Huang, Linhai [3 ,4 ]
Gu, Naiting [3 ,4 ]
Xiao, Yawei [3 ,4 ]
Chen, Hao [3 ,4 ]
机构
[1] Chengdu Univ Tradit Chinese Med, Coll Ophthalmol, Chengdu 610075, Peoples R China
[2] Beijing Acad Quantum Informat Sci, Beijing 100193, Peoples R China
[3] Chinese Acad Sci, Key Lab Adapt Opt, Chengdu 610209, Peoples R China
[4] Univ Chinese Acad Sci, Key Lab Adapt Opt, Beijing 100029, Peoples R China
[5] Key Lab Sichuan Prov Ophthalmopathy Prevent & Cure, Chengdu 610075, Peoples R China
[6] Chengdu Univ Tradit Chinese Med, Ineye Hosp, Chengdu 610075, Peoples R China
基金
中国国家自然科学基金;
关键词
Displacement measurement; Diffraction; Semiconductor device measurement; Dynamic range; Measurement by laser beam; Lenses; Diffraction gratings; Laser triangulation displacement sensor; diffraction grating; large dynamic range; high precision; MEASUREMENT SYSTEM; POSITION; DENSITY; SPOT;
D O I
10.1109/ACCESS.2023.3257358
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
The conventional laser triangulation displacement sensor (LTDS) is difficult to achieve large dynamic range and high precision measurement simultaneously, since LTDS is affected by factors such as limited detector size, nonlinear input and output variables, laser power fluctuation, speckle noise, electronic noise, etc. Given the above background, we proposed a modified LTDS using a diffraction grating to improve the dynamic range and precision simultaneously. Different from the conventional LTDS, the modified LTDS generates more than one spots on the image sensor, thereby the displacements with different ranges can be obtained from the multiple order diffraction spots. Ultimately, the dynamic range and measurement accuracy will be improved simultaneously by integrating these displacements. In this paper, the principle of the modified LTDS for large dynamic range and high precision measurement is described in detail, and we verified the validity and effectiveness of this idea through the experiment. Compared with the traditional LTDS, the experimental results show that the linearity of the modified LTDS is improved by a factor of 1.5685 and the dynamic range is improved 1.2986 times as well as maintaining the same linearity.
引用
收藏
页码:27395 / 27400
页数:6
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