Thermal stability, work function and Fermi level analysis of 2D multi-layered hexagonal boron nitride films

被引:9
|
作者
Marye, Shambel Abate [1 ]
Kumar, Ravi Ranjan [1 ]
Useinov, Artur [1 ]
Tumilty, Niall [1 ]
机构
[1] Natl Yang Ming Chiao Tung Univ, Int Coll Semicond Technol, Hsinchu 30010, Taiwan
关键词
Hexagonal boron nitride; APCVD; Fermi level; Growth temperature; Thermal stability; Nitrogen vacancy V-N; Grain boundary; N; -type; UPS; Electron affinity; H-BN; CONDUCTIVITY; COATINGS;
D O I
10.1016/j.mee.2023.112106
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Thermal stability and Fermi level analysis of commercial multilayer (ML) and as-grown 10 nm thick hexagonal boron nitride (hBN) films on Cu foil by atmospheric chemical vapor deposition (APCVD) by heating in N-2 and air at temperatures <= 900 C-degrees are studied. For all samples, progressive surface oxidation was observed correlating with higher hBN nucleation density. Thermal stability was measured in air from 200 C-degrees to 400 C-degrees (relative humidity similar to 65%) where commercial ML and APCVD material degraded; B-N peaks begin to be replaced by B-O peaks at temperatures >300 C-degrees. It is shown that hBN thermal stability is sensitive to T-growth and Cu foil surface preparation methods such as electropolishing (EP). We evaluate as-grown material for different T-growth conditions (1000 C-degrees, 1030 C-degrees, 1050 C-degrees and 1060 C-degrees) by ultraviolet photoelectron spectroscopy (UPS) to locate and understand subsequent Fermi level and work function variation, confirming our material is in general n-type, which becomes increasingly so as thermal stability regresses. To this effect, we observe a work function increase of 0.45 eV as B-O increases with in-situ anneal temperature. An average electron affinity of 2.13 eV and 1.7 eV is determined for commercial hBN and APCVD material, respectively. Further work is required by material scientists to optimize the material properties of CVD hBN.
引用
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页数:8
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