共 50 条
- [2] Characterization of MOS structures with ultra-thin tunneling oxynitride SURFACE/INTERFACE AND STRESS EFFECTS IN ELECTRONIC MATERIALS NANOSTRUCTURES, 1996, 405 : 333 - 338
- [5] Thermal Characterization and Modeling of Ultra-Thin Silicon Chips PROCEEDINGS OF THE 2014 44TH EUROPEAN SOLID-STATE DEVICE RESEARCH CONFERENCE (ESSDERC 2014), 2014, : 397 - 400
- [8] Mechanical characterization of deformable ultra-thin substrates by experiment and FE simulation 57TH ELECTRONIC COMPONENTS & TECHNOLOGY CONFERENCE, 2007 PROCEEDINGS, 2007, : 1056 - +
- [9] Mechanical Characterization of Ultra-thin Membrane Using Force Sensing Chip 2017 INTERNATIONAL SYMPOSIUM ON MICRO-NANOMECHATRONICS AND HUMAN SCIENCE (MHS), 2017,