A CMOS Lock-In Pixel Image Sensor With Multisimultaneous Gate for Time-Resolved Near-Infrared Spectroscopy

被引:1
|
作者
Lioe, De Xing [1 ]
Fukushi, Yasuko [1 ,2 ]
Hakamata, Masashi [1 ]
Niwayama, Masatsugu [1 ]
Mars, Kamel [1 ]
Yasutomi, Keita [1 ]
Kagawa, Keiichiro [1 ]
Yamamoto, Seiji [3 ]
Kawahito, Shoji [1 ]
机构
[1] Shizuoka Univ, Res Inst Elect, Hamamatsu, Shizuoka 4328011, Japan
[2] Hamamatsu Univ Sch Med, Preeminent Med Photon Educ & Res Ctr, Dept Innovat Med Photon, Hamamatsu, Shizuoka 4313192, Japan
[3] Hamamatsu Univ Sch Med, Educ & Collaborat Dev, Hamamatsu, Shizuoka 4313192, Japan
基金
日本科学技术振兴机构; 日本学术振兴会;
关键词
Logic gates; Electric potential; Charge transfer; Substrates; Modulation; Electric fields; Doping; CMOS image sensor (CIS); lateral electric field charge modulator (LEFM); lock-in pixel; near-infrared spectroscopy (NIRS); pinned photodiode (PPD); time resolved;
D O I
10.1109/TED.2023.3236591
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This article proposes a CMOS lock-in pixel image sensor aiming for time-resolved near-infrared spectroscopy (TR-NIRS). The pixel employs lateral electric field charge modulation (LEFM) with an eight-tap multisimultaneous gate structure and negative substrate bias. The optimization of pixel structure creates a high potential slope with no barrier to facilitate the high-speed photo-generated charge transfer required in the time-resolved application. The sensor employs a two-stage charge transfer architecture with pinned storage diodes (SDs). The effectiveness of the sensor is demonstrated through simulations and experimental measurements. A prototype sensor with 70 (V) x 110 (H) effective pixels to characterize the multisimultaneous gate lock-in pixel is implemented in a 0.11-mu m 1-poly-4metal CMOS image sensor (CIS) technology. A fast intrinsic response of 240 ps is achieved using an 80-ps pulsewidth 780-nm laser diode by the characterization using two simul- taneous gates and a single time window of the lock-in pixel. Performance evaluation using silicon phantoms and further measurement with a rat demonstrates the feasibility of the proposed sensor and setup for TR-NIRS applications.
引用
收藏
页码:1102 / 1108
页数:7
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