Hybrid integrated tunable external cavity laser with sub-10 Hz intrinsic linewidth

In this work, a hybrid integrated tunable external cavity laser (ECL) with a sub-10 Hz intrinsic linewidth is demonstrated. In this hybrid ECL, two Si3N4-based subwavelength hole defect assisted microring resonators, acting as high-Q laser reflectors, are butt-coupled with a chip-scale semiconductor optical amplifier at the two edges, respectively. The experimental results show that the hybrid ECL achieves a sub-10 Hz intrinsic linewidth across a wavelength tuning range from 1525 to 1565 nm, featuring a record lowest value of 6.06 Hz. The demonstrated hybrid ECL opens up opportunities toward the applications of high-speed optical communications and high-resolution light detection and ranging.