Optical Tomography of Polymeric Microsphere Layers Using Confocal Raman Microscopy

被引:0
|
作者
Syring, Alina [1 ,2 ]
Wang, Zunhao [3 ]
Wundrack, Stefan [3 ]
Stosch, Rainer [3 ]
Voss, Tobias [1 ,2 ]
机构
[1] Tech Univ Carolo Wilhelmina Braunschweig, Inst Halbleitertechn, Hans Sommer Str 66, D-38106 Braunschweig, Germany
[2] Tech Univ Carolo Wilhelmina Braunschweig, Lab Emerging Nanometrol LENA, Langer Kamp 6 A/b, D-38106 Braunschweig, Germany
[3] Phys Tech Bundesanstalt, Braunschweig, Germany
关键词
Confocal Raman microscopy; 3D imaging; depth profiling; mapping; polystyrene microsphere; spatial resolution; correction factor; MICROSPECTROSCOPY; SPECTROSCOPY; REFRACTION;
D O I
10.1177/00037028231175922
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
In confocal Raman microscopy, depth profiling is a key application that enables analysis of the structural and chemical composition and size of three-dimensional (3D) transparent objects. However, the precise interpretation of a probed sample's Raman depth profile measurement can be significantly affected by both its size and surrounding objects. This study provides a more comprehensive understanding of the observed optical effects at the interface between polymer spheres and different substrates. Ray- and wave-optical simulations support our results. We derive a correction factor that, depending on the instrumental configuration, allows us to determine the nominal dimensions of the scanned objects more accurately from Raman depth profiles. Our studies support the need for careful consideration when employing depth profiling in confocal Raman microscopy for nondestructive, quantitative tomography of 3D objects.
引用
收藏
页码:744 / 752
页数:9
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