Effects of Laser Spot Size on the Microstructure and Magnetic Properties of PLD Fabricated Fe-Co Films

被引：1
|
作者：
Yamashita, Akihiro [1 ]
Kaku, Hibiki [1 ]
Yanai, Takeshi [1 ]
Nakano, Masaki [1 ]
Fukunaga, Hirotoshi [1 ]
机构：
[1] Nagasaki Univ, Grad Sch Engn, Nagasaki 8528521, Japan
来源：
IEEE TRANSACTIONS ON MAGNETICS | 2023年 / 59卷 / 11期
关键词：
Defocus rate (DF rate); droplet; Fe-Co; laser energy density; pulsed laser deposition (PLD);
D O I：
10.1109/TMAG.2023.3287194
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Fe-Co films are prepared by using a pulsed laser deposition (PLD) method with several diameters of a laser beam. It was found that the usage of an Fe-Co alloy target together with a small spot size, which means that a laser beam was focused on the surface of a target, enables us to reduce the number and/or size of droplets and improve the surface roughness of samples. The transfer of composition from a target to the corresponding film deteriorated as the diameters of a laser beam decreased. Furthermore, an as-deposited Fe-Co film prepared by using the small spot size had a magnetization of approximately 2.4 T at the applied magnetic field of 1400 kA/m.
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页数：3
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