MOSs-String-Triggered Silicon-Controlled Rectifier (MTSCR) ESD Protection Device for 1.8 V Application

被引:0
|
作者
Chen, Ruibo [1 ]
Wei, Hao [1 ]
Liu, Hongxia [1 ]
Hou, Fei [2 ]
Xiang, Qi [1 ]
Du, Feibo [2 ]
Yan, Cong [1 ]
Gao, Tianzhi [1 ]
Liu, Zhiwei [2 ]
机构
[1] Xidian Univ, Sch Microelect, Key Lab Wide Band Gap Semicond Mat & Devices Educ, Xian 710071, Peoples R China
[2] Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Device, Chengdu 610056, Peoples R China
基金
中国国家自然科学基金;
关键词
ESD protection; silicon-controlled rectifier (SCR); NMOS; trigger voltage; ELECTROSTATIC DISCHARGE PROTECTION; SCR; DESIGN; OVERSHOOT;
D O I
10.3390/mi14030632
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
In this work, a new low voltage-triggered silicon-controlled rectifier named MTSCR is realized in a 65 nm CMOS process for low voltage-integrated circuits electrostatic discharge (ESD) protections. The MTSCR incorporates an external NMOSs-string, which drives the internal NMOS (INMOS) of MTSCR to turn on, and then the INMOS drive SCR structure to turn on. Compared with the existing low trigger voltage (V-t1) ESD component named diodes-string-triggered SCR (DTSCR), the MTSCR can realize the same low V-t1 characteristic but less area penalty of similar to 44.3% reduction. The results of the transmission line pulsing (TLP) measurement shows that the MTSCR possesses above 2.42 V holding voltage (V-h) and a low V-t1 of similar to 5.03 V, making it very suitable for the ESD protections for 1.8 V input/output (I/O) ports in CMOS technologies.
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页数:8
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