Design and simulation of a tuning fork micromachined gyroscope with slide film damping

被引：0
|
作者：
CHE Lufeng XIONG Bin JIAO Jiwei WANG Yuelin State Key Laboratory of Transducer Technology Shanghai Institute of Microsystem and Information Technology Chinese Academy of Sciences Shanghai China [200050 ]
机构：
来源：
光学精密工程 | 2005年 / 05期
关键词：
micromachined gyroscope; slide film damping; design simulation;
D O I：
暂无
中图分类号：
TH703 [结构];
学科分类号：
摘要：
A novel tuning fork micromachined gyroscope, based on slide-film damping, is presented. The electrostatic driving gyroscope consists of two driving masses each of which supports one sensitive mass. The angular rate is sensed by the differential capacitances consisted of movable bar electrodes and fixed bar electrodes located on the glass wafer. The gyroscope can operate at atmospheric pressure with slide film damping in the driving and sensing directions, eliminate vacuum packaging and restrain cross-axis acceleration signal. The results of design and simulation show that the driving and sensing mode frequencies are 3 106 Hz and 3 175 Hz,respectively, and the Q-values in driving and sensitive modes are 1 721 and 1 450 respectively. The design resolution is 0.025°/s.
引用
收藏
页码：519 / 524
页数：6
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