BOND STRUCTURE OF HYDROGENATED DIAMOND LIKE CARBON FILMS DEPOSITED BY PLASMA BASED ION IMPLANTATION

被引：0
|
作者：
G.Li
机构：
来源：
ActaMetallurgicaSinica(EnglishLetters) | 1999年 / 04期
关键词：
hydrogenated DLCfilms; core level band; valence band; Raman spec troscopy; PBII;
D O I：
暂无
中图分类号：
TG174.4 [金属表面防护技术];
学科分类号：
摘要：
The bondstructureofhydrogenated diamond likecarbon( DLC) filmsdeposited with plasmabased ionimplantation ( PBII) wascharacterized by Raman spectroscopy andcore level band and valenceband spectrum of XPS. Theresultsshow thatthe hydrogenated carbon filmspre pared with lower pulse bias, especially zero bias, display polymer like feature. The DLCfilms deposited with 15 kVpulsebiascontainsthehighestdensityofsp3 bonds. Thecore lev elband ( C1s) spectra of allfilmsshifttowardlow bindingenergy after4kVAr+ ion bom barding. The valenceband spectra of hydrogenated DLCfilmsarequite differentfrom thatof diamond and graphite. However, afterion bombarding, besidetwosingle peaksatabout17 0 eVand 12 5 eV(similarto graphite) ,two new sharp peaksappearatabout21 3 eVand 8 0 eV,respectively. Thepeak at8 0 eVcan beconsidertothecontribution duetothe actingofimplanted argon on C Cbondsand C Hbondsin thefilms.
引用
收藏
页码：551 / 556
页数：6
相关论文
共 50 条
  • [1] Plasma based nitrogen ion implantation to hydrogenated diamond-like carbon films
    Kimura, Takashi
    Yanai, Hidekazu
    Nakao, Setsuo
    Azuma, Kingo
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2018, 433 : 87 - 92
  • [2] Thermal stability of diamond-like carbon films deposited by plasma based ion implantation technique with bipolar pulses
    Choi, Junho
    Miyagawa, Soji
    Nakao, Setsuo
    Ikeyama, Masami
    Miyagawa, Yoshiko
    DIAMOND AND RELATED MATERIALS, 2006, 15 (4-8) : 948 - 951
  • [3] Mechanical and electrical properties of diamond-like carbon films deposited by plasma source ion implantation
    Baba, K.
    Hatada, R.
    Flege, S.
    Ensinger, W.
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2009, 267 (8-9): : 1688 - 1691
  • [4] Properties of hydrogenated amorphous carbon thin films deposited by plasma-based ion implantation method
    Ishihara, M
    Suzuki, M
    Watanabe, T
    Tsuda, O
    Nakamura, T
    Tanaka, A
    Koga, Y
    DIAMOND AND RELATED MATERIALS, 2004, 13 (4-8) : 1449 - 1453
  • [5] Formation of diamond-like carbon films by plasma-based ion implantation and their characterization
    Ensinger, Wolfgang
    NEW DIAMOND AND FRONTIER CARBON TECHNOLOGY, 2006, 16 (01): : 1 - 32
  • [6] Preparation of hydrophobic diamond like carbon films by plasma source ion implantation
    Hatada, R
    Baba, K
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1999, 148 (1-4): : 655 - 658
  • [7] Preparation of hydrophobic diamond like carbon films by plasma source ion implantation
    Technology Cent of Nagasaki, Nagasaki, Japan
    Nucl Instrum Methods Phys Res Sect B, 1-4 (655-658):
  • [8] Ion implantation of diamond-like carbon films
    Zheng, Zhihao
    Xiang, Jinzhong
    Liao, Chauggang
    Xiong, Jing
    Wang, Yongqiang
    Zhang, Fangqing
    Vacuum, 1991, 42 (16)
  • [9] ION IMPLANTATION OF DIAMOND-LIKE CARBON FILMS
    项金钟
    郑志豪
    廖常庚
    熊京
    汪永强
    张仿清
    Nuclear Science and Techniques, 1992, (01) : 25 - 29
  • [10] Deposition of diamond-like carbon films using plasma based ion implantation with bipolar pulses
    Miyagawa, S
    Nakao, S
    Ikeyama, M
    Miyagawa, Y
    SURFACE & COATINGS TECHNOLOGY, 2002, 156 (1-3): : 322 - 327
12345