On peak current in atmospheric pulsemodulated microwave discharges by the PIC-MCC model

被引:0
|
作者
张远涛 [1 ]
刘雨 [1 ]
刘冰 [1 ]
机构
[1] School of Electrical Engineering,Shandong University
基金
中国国家自然科学基金;
关键词
atmospheric microwave plasmas; pulse modulation; duty cycle; modulation frequency;
D O I
暂无
中图分类号
O461.25 [];
学科分类号
0809 ; 080901 ;
摘要
Pulse modulation provides a new way to tailor the electron density, electron energy and gas temperature in atmospheric radio-frequency(rf) discharges. In this paper, by increasing the rf frequency to several hundreds of MHz, or even much higher to the range of GHz, a very strong peak current in the first period(PCFP) with much larger electron energy can be formed during the power-on phase, which is not observed in the common pulse modulation discharges at a rf frequency of 13.56 MHz. The PIC-MCC model is explored to unveil the generation mechanism of PCFP, and based on the simulation data a larger voltage increasing rate over a quarter of a period and the distribution of electron density just before the power-on phase are believed to play key roles; the PCFP is usually produced in the microplasma regime driven by the pulsed power supply. The effects of duty cycle and pulse modulation frequency on the evolution of PCFP are also discussed from the computational data. Therefore, the duty cycle and pulse modulation frequency can be used to optimize the generation of PCFP and high-energy electrons.
引用
收藏
页码:84 / 93
页数:10
相关论文
共 24 条
  • [1] On peak current in atmospheric pulsemodulated microwave discharges by the PIC-MCC model
    张远涛
    刘雨
    刘冰
    Plasma Science and Technology, 2017, 19 (08) : 84 - 93
  • [2] On peak current in atmospheric pulse-modulated microwave discharges by the PIC-MCC model
    Zhang, Yuantao
    Liu, Yu
    Liu, Bing
    PLASMA SCIENCE & TECHNOLOGY, 2017, 19 (08)
  • [3] PIC-MCC Simulations of Capacitive RF Discharges for Plasma Etching
    Takao, Yoshinori
    Matsuoka, Kenji
    Eriguchi, Koji
    Ono, Kouichi
    27TH INTERNATIONAL SYMPOSIUM ON RAREFIED GAS DYNAMICS, 2010, PTS ONE AND TWO, 2011, 1333 : 1051 - 1056
  • [4] A hybrid PIC-MCC/fluid model for streamer discharges under high gas pressures
    Pfeiffer, W
    Tong, LZ
    Schoen, D
    GASEOUS DIELECTRICS IX, 2001, : 135 - 141
  • [5] PIC-MCC Numerical Study on Discharge Characteristics of Atmospheric Nanosecond-pulse Discharges Without Dielectric Barriers
    Xin X.
    Liu B.
    Zhang Y.
    Gaodianya Jishu/High Voltage Engineering, 2018, 44 (03): : 944 - 951
  • [6] PIC-MCC model of a plasma in the vicinity of a cylindrical Langmuir probe
    Soberon, F.
    CONTRIBUTIONS TO PLASMA PHYSICS, 2006, 46 (5-6) : 433 - 438
  • [7] A PIC-MCC Modeling of Sheath Recovery Processes After Current Zero
    Wang, Zhenxing
    Wang, Haoran
    Zhou, Zhipeng
    Geng, Yingsan
    Wang, Jianhua
    Liu, Zhiyuan
    2015 3RD INTERNATIONAL CONFERENCE ON ELECTRIC POWER EQUIPMENT - SWITCHING TECHNOLOGY (ICEPE-ST), 2015, : 26 - 30
  • [8] PIC-MCC model for the plasma focused electron beam in the Pasotron
    Verboncoeur, JP
    HIGH ENERGY DENSITY AND HIGH POWER RF, 2003, 691 : 367 - 367
  • [9] Amplification process of a gas electron multiplier simulated by PIC-MCC model
    Yang Lanlan
    Tu Yan
    Tolner, Harm
    Zhong Xuefei
    Zhang Panpan
    Qin Nana
    Ma Shanle
    NUCLEAR SCIENCE AND TECHNIQUES, 2012, 23 (04) : 203 - 208
  • [10] Amplification process of a gas electron multiplier simulated by PIC-MCC model
    Harm Tolner
    NuclearScienceandTechniques, 2012, 23 (04) : 203 - 208