Novel silicon-controlled rectifier(SCR) for digital and high-voltage ESD power supply clamp

被引:0
|
作者
ZHANG Peng [1 ]
WANG Yuan [2 ]
ZHANG Xing [2 ]
MA XiaoHua [1 ]
HAO Yue [1 ]
机构
[1] Key Laboratory of Wide Band-Gap Semiconductor Materials and Devices,School of Microelectronics,Xidian University
[2] Key Laboratory of Microelectronic Devices and Circuits,Institute of Microelectronics,Peking University
基金
中国国家自然科学基金;
关键词
electrostatic discharge(ESD); SCR; latch-up immunity; holding voltage; power supply clamp; high voltage;
D O I
暂无
中图分类号
TM461 [整流器];
学科分类号
摘要
Due to latch-up issue,the main problem of silicon-controlled rectifier(SCR)for power supply clamps in on-chip ESD protection is its inherent low holding voltage,especially in high-voltage applications.In this paper,we proposed a MOS-inside SCR(MISCR)showing nearly no snapback character and good ESD robustness,which is qualified for on-chip power clamp ESD protection.The stacked device achieves a series of triggering and holding voltage by altering the stacking number,which can also be used for the high voltage ESD power supply clamp applications.
引用
收藏
页码:291 / 296
页数:6
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