A new method for measuring laser beam straightness error based on common-path compensation

被引：0
|
作者：
由凤玲 [1 ]
冯其波 [1 ]
张斌 [1 ]
翟玉生 [1 ]
曹睿 [1 ]
方恒楚 [1 ]
机构：
[1] Key Laboratory of Luminescence and Optical Information of Ministry of Education, Beijing Jiaotong University
来源：
Optoelectronics Letters | 2009年 / 5卷 / 05期
基金：
中国国家自然科学基金;
关键词：
A new method for measuring laser beam straightness error based on common-path compensation;
D O I：
暂无
中图分类号：
TN24 [激光技术、微波激射技术];
学科分类号：
0803 ; 080401 ; 080901 ;
摘要：
A novel method for laser beam straightness error measurements based on common-path compensation is proposed. The basic principle of the method is described and the math-model is established. Furthermore,the influence of laser beam drift on straightness error measurements is analyzed. The experimental results show that the measurement accuracy can be greatly improved by using the common-path compensation for laser beam drift.
引用
收藏
页码：383 / 386
页数：4
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