Analyzing the grating profile parameters based on scanning-electron microscope images

被引：1

作者：

Li, Y. ^{[1
]}

Zeng, L.J. ^{[1
]}

机构：

[1] State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments, Tsinghua University, Beijing 100084, China

来源：

Key Engineering Materials | 2008年 / 381-382卷

关键词：

Image analysis - Diffraction efficiency - Scanning - Image enhancement - Diffraction gratings;

D O I：

暂无

中图分类号：

TN2 [光电子技术、激光技术];

学科分类号：

0803 ; 080401 ; 080901 ;

摘要：

Measuring grating profiles is very helpful for the analysis of specifications of gratings and improvement of grating fabrication techniques. We analyzed grating grooves by digitizing the scanning-electron microscope (SEM) images. Some kinds of filter and arithmetic were developed to extract the contour line of grating profile. In order to analyze the diffraction efficiency affected by the shape of grating profile, the calculated diffraction efficiency based on the SEM image and measured diffraction efficiency based on experiment was compared and analyzed.

引用

页码：299 / 300