0.08 fF, 0.72 nA dark current, 91% Quantum Efficiency, 38 Gb/s Nano-photodetector on a 45 nm CMOS Silicon-Photonic Platform

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作者
Fu, Mingye [1 ]
Yoo, S. J. Ben [1 ]
机构
[1] Univ Calif Davis, Dept Elect & Comp Engn, Davis, CA 95616 USA
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TM [电工技术]; TN [电子技术、通信技术];
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0808 ; 0809 ;
摘要
We demonstrated a Germanium-on-Silicon photodetector utilizing an asymmetric-Fabry-Perot resonator with 0.08 fF capacitance. The measurements at 1315.5 nm show 0.72 nA (3.40 nA) dark current, 0.93 A/W (0.96 A/W) responsivity, 36 Gb/s (38 Gb/s) operation at -1V (-2V) bias. (c) 2023 The Author(s)
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