A compact non-dispersive infrared carbon dioxide gas sensor with high precision and large detection range

被引:0
|
作者
Fan, Xueming [1 ]
Li, Yunxin [1 ]
Guan, Hongjian [1 ]
Lei, Yanzhao [1 ]
Liu, Ziji [1 ]
Wang, Yang [1 ]
Su, Yuanjie [1 ]
Tai, Huiling [1 ]
Jiang, Yadong [1 ]
Li, Weizhi [1 ]
机构
[1] Univ Elect Sci & Technol China UESTC, State Key Lab Elect Thin Films & Integrated Device, Chengdu 610054, Peoples R China
基金
中国国家自然科学基金;
关键词
Gas sensor; Non-dispersive infrared; Gas channel; Carbon dioxide detection; DETECTION SYSTEM;
D O I
10.1016/j.sna.2025.116284
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Compared with traditional gas sensors such as metallic oxide semiconductors (MOS) and electrochemical (EC) ones, non-dispersive infrared (NDIR) gas sensors have the advantage of good stability, excellent selectivity, and long-term reliability. However, similar to all kinds of sensors, good precision (or large sensitivity) and a large measurement range cannot be reached in one NDIR gas sensor. This issue is addressed in this work by proposing a multi-channel NDIR sensor. Measurements revealed that the sensor's detection range is from 50 ppm to 10 % with a relative error less than 5 % and the relative standard deviation (RSD) of the sensor's repeatability is less than 0.4 %. These results demonstrated that the presented NDIR gas sensor can effectively detect CO2 gas with a large detection range, high accuracy, as well as excellent repeatability, offering a valuable reference for the advancement of NDIR sensors.
引用
收藏
页数:8
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