[1] Natl Key Lab Adv Micro & Nano Manufacture Technol, Beijing 100871, Peoples R China
[2] Peking Univ, Sch Integrated Circuits, Beijing 100871, Peoples R China
[3] Shanxi Datong Univ, Inst Solid State Phys, Shanxi Prov Key Lab Microstruct Electromagnet Func, Datong 037009, Peoples R China
[4] Beijing Informat Sci & Technol Univ, Sch Instrument Sci & Optoelect Engn, Beijing 100096, Peoples R China
[5] Univ Sci & Technol Beijing, Sch Automat, Beijing 100083, Peoples R China
[6] Shandong Univ, Taishan Coll, Jinan 250000, Shandong, Peoples R China