Structure and Properties of TiN-Cu Composite Coatings on T15K6 Alloy Obtained by Vacuum-Arc Evaporation and Magnetron Sputtering

被引：0

作者：

Tsyrenov, D. b. -d. ^{[1
]}

Semenov, A. P. ^{[1
]}

Semenova, I. A. ^{[1
]}

Ulahanov, N. S. ^{[1
]}

机构：

[1] Russian Acad Sci, Inst Phys Mat Sci, Siberian Branch, Ulan Ude 670047, Russia

来源：

JOURNAL OF SURFACE INVESTIGATION | 2024年 / 18卷 / 05期

关键词：

vacuum-arc evaporation; magnetron sputtering; composite coatings; microhardness; wear resistance; MECHANICAL-PROPERTIES; MICROSTRUCTURE; HARDNESS;

D O I：

10.1134/S1027451024700915

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

The features of the formation of TiN-Cu composite coatings using the hybrid method of vacuum-arc evaporation of titanium and magnetron sputtering of copper are considered. It has been shown that under the selected conditions for the TiN synthesis copper does not form chemical compounds with titanium and nitrogen. The structure and properties of TiN-Cu composite coatings are examined. The introduction of copper into the coating composition leads to the grinding of the nitride phase crystallites. A maximum microhardness of coatings of 37-41 GPa is achieved at a copper concentration of similar to 3-7 at %. The technological parameters allowing the application of wear-resistant functional TiN-Cu coatings on T15K6 alloy substrates have been determined.

引用

页码：1118 / 1122

页数：5

共 17 条

[1] Synthesis of TiN-Cu Nanocomposite Coatings Using Combined Vacuum-Arc Evaporation, Magnetron Sputtering, and Ion Beam Sputtering
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Semenova, I. A.
RUSSIAN METALLURGY, 2023, 2023 (03): : 303 - 305
[2] Modelling of process formation of the nanocomposite TiN-Cu layers received by vacuum-arc evaporation of Ti and magnetron sputtering of Cu
Tsyrenov, D. B-D
Semenov, A. P.
Smirnyagina, N. N.
5TH INTERNATIONAL CONGRESS ON ENERGY FLUXES AND RADIATION EFFECTS 2016, 2017, 830
[3] Synthesis of TiN–Cu Nanocomposite Coatings Using Combined Vacuum-Arc Evaporation, Magnetron Sputtering, and Ion Beam Sputtering
A. P. Semenov
D. B.-D. Tsyrenov
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Russian Metallurgy (Metally), 2023, 2023 : 303 - 305
[4] An Apparatus for Vacuum Deposition of Composite TiN-Cu Coatings Using Coupled Vacuum-Arc and Ion-Plasma Processes
Semenov, A. P.
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Semenova, I. A.
INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, 2017, 60 (06) : 892 - 895
[5] Formation features of composite coatings based on titanium nitride by method of vacuum-arc evaporation and magnetron sputtering
Tsyrenov, D. B-D
Semenov, A. P.
Smirnyagina, N. N.
Semenova, I. A.
6TH INTERNATIONAL CONGRESS ENERGY FLUXES AND RADIATION EFFECTS, 2018, 1115
[6] PROPERTIES OF COMPOSITE VACUUM-ARC COATINGS OF THE TiN-Ti/TiON STRUCTURE
Andreev, A.
Kostyk, G.
Sysoiev, Iu
Minaiev, N.
PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY, 2018, (01): : 127 - 133
[7] INFLUENCE OF THE THICKNESS OF THE BILAYER TiN / ZrN ON STRUCTURE AND PROPERTIES OF THE MULTILAYER COATING OBTAINED BY VACUUM-ARC EVAPORATION
Sobol', O. V.
Andreev, A. A.
Gorban, V. F.
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Pinchuk, N. V.
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PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY, 2015, (02): : 124 - 129
[8] Structure and Properties of Cermet Coatings Produced by Vacuum-Arc Evaporation of a High-Entropy Alloy
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Akhmadeev, Yuriy Kh.
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Koval, Nikolai N.
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COATINGS, 2023, 13 (08)
[9] Ceramic-metallic (TiN-Cu) nanostructured ion-plasma vacuum-arc coatings for cutting hard-alloy tools
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Russian Journal of Non-Ferrous Metals, 2014, 55 : 489 - 493
[10] Ceramic-metallic (TiN-Cu) nanostructured ion-plasma vacuum-arc coatings for cutting hard-alloy tools
Blinkov, I. V.
Volkhonskii, A. O.
Laptev, A. I.
Sviridova, T. A.
Tabachkova, N. Yu
Belov, D. S.
Ershova, A. V.
RUSSIAN JOURNAL OF NON-FERROUS METALS, 2014, 55 (05) : 489 - 493

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