Active Vibration Isolation Platform with Distributed Feed-Forward Feedback Hybrid Control

PurposeIn the field of contemporary scientific instrument development, there is a discernible shift towards the pursuit of low-noise and high-resolution atomic force microscopy (AFM). The growing demand for precision in AFM requires rigorous standards for the mechanical noise isolation of this instrument.MethodsThis paper puts forth a hybrid active and passive vibration isolation platform for AFM. The initial step is to establish a dynamic model for the vibration isolation platform. This is done based on the principles of structural dynamics, and a distributed suboptimal feedforward control scheme is subsequently proposed. Suboptimal feedforward control parameters are derived from this approach. Subsequently, an active vibration isolation algorithm using a hybrid feedforward and feedback control strategy is designed.ResultsFinally, both a rigidly mounted system simulation model and a soft-mounted experimental system are constructed, taking into consideration the sensitivity of the load to direct disturbances. The results demonstrate that, under both rigid and soft mounting conditions, the isolation system exhibits effective vibration suppression within a bandwidth exceeding 2 Hz, ensuring the proper functioning of the AFM.ConclusionThis method has been demonstrated to be an effective means of reducing the impact of environmental vibrations on the atomic force microscope. Furthermore, it has been shown to have certain engineering applications.