Three-dimensional Electric Field Sensing Chip Via Piezoelectric Actuation in a Single Shielding Electrode

被引：0
|
作者：
Peng S. [1 ,2 ]
Xia S. [1 ]
Liu X. [1 ,2 ]
Gao Y. [1 ,2 ]
Zhang Z. [1 ,2 ]
Zhang W. [1 ,2 ]
Xing X. [1 ,2 ]
Liu Y. [1 ,2 ]
Wu Z. [1 ]
Peng C. [1 ]
机构：
[1] State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Science, Beijing
[2] School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing
来源：
Dianzi Yu Xinxi Xuebao/Journal of Electronics and Information Technology | 2024年 / 46卷 / 04期
基金：
中国国家自然科学基金;
关键词：
Electric field; Single shielding electrode; Three-dimensional; Vertical vibration;
D O I：
10.11999/JEIT230361
中图分类号：
学科分类号：
摘要：
A three-dimensional electric field sensing chip equipped with a single shielding electrode and piezoelectric actuation is proposed. This design achieves high-sensitivity detection of the three-dimensional electric fields, simultaneously reducing excitation voltage and crosstalk noise is proposed. The sensing structure comprises one group of shielding electrodes and four sets of symmetrically distributed sensing electrodes. In response to piezoelectric actuation, the shielding electrodes undergo vertical vibrations, while the four sensing electrode sets generate induced currents when subjected to external electric fields. A differential decoupling method can be used to calculate the signals corresponding to the electric field components along the x-, y-, and z-axes. Finite element simulation was conducted to design the structure of the three-dimensional electric field sensing chip, analyze the feasibility of its measurement, and optimize key structural parameters. The fabrication process for the sensing chip was designed and implemented. Experimental results reveal that the output sensitivities are 0.221 4 mV/(kV/m) for the x-axis, 0.358 0 mV/(kV/m) for the y-axis, and 2.176 8 mV/(kV/m) for the z-axis. The maximum measurement error for the three-dimensional electric fields remains < 5.3%. © 2024 Science Press. All rights reserved.
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页码：1513 / 1520
页数：7
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