Preparation and electrical properties of rhombohedral Pb(ZrxTi1-x)O3 thin films by RF magnetron sputtering method

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Dept. of Electronics and Informatics, Faculty of Engineering, Toyama Prefectural University, Kosugi-machi, Toyama 939-0398, Japan [1 ]
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Jpn J Appl Phys Part 1 Regul Pap Short Note Rev Pap | / 12 A卷 / 6807-6811期
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