Wideband electrostatic microwave switch fabricated by surface micromachining

被引：0
|
作者：
Chang, Chienliu [1 ]
Dai, Ching-Liang [1 ]
Chen, Jenn-Yi [1 ]
Chen, Honglin [1 ]
Yen, Kaihsiang [1 ]
Chiou, Jing-Hung [1 ]
Chang, Pei-Zen [1 ]
机构：
[1] Industrial Technology Research Inst, Hsin-Chu, Taiwan
来源：
Journal of the Chinese Institute of Engineers, Transactions of the Chinese Institute of Engineers,Series A/Chung-kuo Kung Ch'eng Hsuch K'an | 2000年 / 23卷 / 06期
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D O I：
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学科分类号：
摘要：
Microwave devices
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收藏
页码：781 / 787
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