X-ray induced mask contamination and particulate monitoring in x-ray steppers

被引：0
|
作者：
机构：
来源：
J Vac Sci Technol B | / 6卷 / 4336期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [1] X-ray induced mask contamination and particulate monitoring in x-ray steppers
    Capasso, C
    Pomerene, A
    Chu, W
    Leavey, J
    Lamberti, A
    Hector, S
    Oberschmidt, J
    Pol, V
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (06): : 4336 - 4340
  • [2] Mask contamination induced by X-ray exposure
    Okada, I
    Saitoh, Y
    Deguchi, K
    Fukuda, M
    Ban, H
    Matsuda, T
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1998, 37 (12B): : 6808 - 6812
  • [3] X-RAY STEPPERS - THIS STARTUP IS READY
    CURRAN, L
    ELECTRONICS, 1988, 61 (16): : 50 - 50
  • [4] Fabrication of high precision X-ray mask for X-ray grating of X-ray Talbot interferometer
    Daiji Noda
    Hiroshi Tsujii
    Naoki Takahashi
    Tadashi Hattori
    Microsystem Technologies, 2010, 16 : 1309 - 1313
  • [5] Fabrication of high precision X-ray mask for X-ray grating of X-ray Talbot interferometer
    Noda, Daiji
    Tsujii, Hiroshi
    Takahashi, Naoki
    Hattori, Tadashi
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2010, 16 (8-9): : 1309 - 1313
  • [6] X-ray: Singapore synchrotron, Mitsubishi steppers
    不详
    SOLID STATE TECHNOLOGY, 1997, 40 (08) : 42 - 42
  • [7] X-RAY MONITORING OF ULTRALUMINOUS X-RAY SOURCES
    Kaaret, Philip
    Feng, Hua
    ASTROPHYSICAL JOURNAL, 2009, 702 (02): : 1679 - 1682
  • [8] FABRICATION OF CARBON MEMBRANE X-RAY MASK FOR X-RAY LITHOGRAPHY
    Noda, Daiji
    Takahashi, Naoki
    Tokuoka, Atsushi
    Katori, Megumi
    Hattori, Tadashi
    PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION (IMECE 2010), VOL 10, 2012, : 279 - 283
  • [9] X-RAY MASK REPAIR
    BLAUNER, PG
    MAUER, J
    IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1993, 37 (03) : 421 - 434
  • [10] X-RAY MASK DISTORTIONS
    KARNEZOS, M
    SOLID STATE TECHNOLOGY, 1987, 30 (09) : 151 - 156
12345