New nitrogen-related defects in nitrogen-rich a-SixN1-x:H

被引：0
|
作者：
Chen, D.Q. [1 ]
Viner, J.M. [1 ]
Taylor, P.C. [1 ]
机构：
[1] Univ of Utah, Salt Lake City, United States
来源：
Journal of Non-Crystalline Solids | 1996年 / 198-200卷 / pt 1期
关键词：
D O I：
10.1016/0022-3093(95)00697-4
中图分类号：
学科分类号：
摘要：
21
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页码：334 / 337
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