Fast hot-carrier aging method of charging damage measurement

被引：0
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作者：
Cheung, K.P. [1 ]
Lloyd, E.J. [1 ]
机构：
[1] Bell Lab, Murray Hill, United States
来源：
International Symposium on Plasma Process-Induced Damage, P2ID, Proceedings | 1999年
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页码：208 / 211
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