PRESSURE DEPENDENCE OF CARBON FILM COATING BY A TOROIDAL METHANE DISCHARGE.

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作者：
Kojima, Hiroaki [1 ]
Kako, Hidenori [1 ]
Terada, Mamoru [1 ]
Sugai, Hideo [1 ]
Okuda, Takayoshi [1 ]
机构：
[1] Nagoya Univ, Dep of Electrical, Engineering, Nagoya, Jpn, Nagoya Univ, Dep of Electrical Engineering, Nagoya, Jpn
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes | 1985年 / 24卷 / 11期
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页码：1432 / 1435
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