Unconventional methods for fabrication of submicron structures in microelectronics

被引：0
|
作者：
机构：
来源：
Mikroelektronika | / 25卷 / 05期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：339 / 345
相关论文
共 50 条
  • [1] Fabrication of tunable antidot structures with submicron airbridges
    Feng, Y
    Sachrajda, AS
    Zawadzki, P
    Kolind, S
    Buchanan, M
    Smet, JH
    Lapointe, J
    Marshall, PA
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1999, 17 (06): : 3231 - 3234
  • [2] Fabrication of tunable antidot structures with submicron airbridges
    J Vac Sci Technol B Microelectron Nanometer Struct, (3231-3234):
  • [3] DEEP-SUBMICRON STRUCTURES IN YBCO - FABRICATION AND MEASUREMENTS
    VANDERHARG, AJM
    VANDERDRIFT, E
    HADLEY, P
    IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY, 1995, 5 (02) : 1448 - 1451
  • [4] Fabrication of submicron proteinaceous structures by direct laser writing
    Serien, Daniela
    Takeuchi, Shoji
    APPLIED PHYSICS LETTERS, 2015, 107 (01)
  • [5] Fabrication of Unconventional Colloidal Self-Assembled Structures
    Choi, Hong Kyoon
    Im, Sang Hyuk
    Park, O. Ok
    LANGMUIR, 2010, 26 (15) : 12500 - 12504
  • [6] Fabrication of ordered carbon nanotube structures by unconventional lithography
    Greco, Pierpaolo
    Facchini, Massimo
    Cavallini, Massimiliano
    Ruani, Giampiero
    Dionigi, Chiara
    Biscarini, Fabio
    PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 2010, 247 (04): : 877 - 883
  • [7] Fabrication of submicron structures by three-dimensional laser lithography
    I. I. Shishkin
    M. V. Rybin
    K. B. Samusev
    M. F. Limonov
    R. V. Kiyan
    B. N. Chichkov
    Yu. S. Kivshar’
    P. A. Belov
    JETP Letters, 2014, 99 : 531 - 534
  • [8] Fabrication of 3-D submicron glass structures by FIB
    Chao, C. H.
    Pan, C. T.
    Wu, J. R.
    2007 2ND IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3, 2007, : 311 - +
  • [9] Fabrication of 3-D Submicron Glass Structures by FIB
    Chao, C. H.
    Shen, S. C.
    Wu, J. R.
    JOURNAL OF MATERIALS ENGINEERING AND PERFORMANCE, 2009, 18 (07) : 878 - 885
  • [10] Fabrication of submicron structures by three-dimensional laser lithography
    Shishkin, I. I.
    Rybin, M. V.
    Samusev, K. B.
    Limonov, M. F.
    Kiyan, R. V.
    Chichkov, B. N.
    Kivshar', Yu. S.
    Belov, P. A.
    JETP LETTERS, 2014, 99 (09) : 531 - 534
12345