Research on micro/nanomachining using an atomic force microscope combined with diamond tip

被引：0
|
作者：
Zhao, Q.L. [1 ]
Dong, S. [1 ]
Zhang, X.L. [1 ]
机构：
[1] Precision Eng. Res. Inst., Harbin Inst. of Technol., Harbin 150001, China
来源：
Jixie Gongcheng Xuebao/Chinese Journal of Mechanical Engineering | 2000年 / 36卷 / 11期
关键词：
D O I：
10.3901/jme.2000.11.064
中图分类号：
学科分类号：
摘要：
Machining
引用
收藏
页码：64 / 69
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