Comparative study of the GaAs (113), (115), (001), (1¯1¯5¯), (1¯1¯3¯), and (110) surfaces by atomic force microscopy, low energy electron diffraction, and reflectance anisotropy spectroscopy

被引:0
|
作者
Pristovsek, Markus [1 ]
Menhal, H. [1 ]
Schmidtling, T. [1 ]
Esser, N. [1 ]
Richter, W. [1 ]
机构
[1] Technische Universität Berlin, Inst. Festkorperphysik, H., Berlin, Germany
来源
Microelectronics Journal | / 30卷 / 04期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
页码:449 / 453
相关论文
共 50 条
  • [1] Comparative study of the GaAs (113), (115), (001), ((1)over-bar(1)over-bar(5)over-bar), ((1)over-bar(1)over-bar(3)over-bar), and (110) surfaces by atomic force microscopy, low energy electron diffraction, and reflectance anisotropy spectroscopy
    Pristovsek, M
    Menhal, H
    Schmidtling, T
    Esser, N
    Richter, W
    MICROELECTRONICS JOURNAL, 1999, 30 (4-5) : 449 - 453
  • [2] THE CHARACTERIZATION OF THE GROWTH OF SUBMONOLAYER COVERAGES (1/200-TO-1 MONOLAYER) OF SI AND BE ON GAAS(001) - A REFLECTANCE ANISOTROPY SPECTROSCOPY AND REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION STUDY
    WOOLF, DA
    ROSE, KC
    MORRIS, SJ
    WESTWOOD, DI
    RUMBERG, J
    REINHARDT, F
    RICHTER, W
    WILLIAMS, RH
    JOURNAL OF CRYSTAL GROWTH, 1995, 150 (1-4) : 197 - 201
  • [3] Characterization of the growth of sub-monolayer coverages (1/200th to 1 monolayer) of Si and Be on GaAs(001): a reflectance anisotropy spectroscopy and reflection high-energy electron diffraction study
    Woolf, D.A.
    Rose, K.C.
    Morris, S.J.
    Westwood, D.I.
    Rumberg, J.
    Reinhardt, F.
    Richter, W.
    Williams, R.H.
    Journal of Crystal Growth, 1995, 150 (1 -4 pt 1): : 197 - 201
  • [4] LOW-ENERGY ELECTRON-DIFFRACTION INTENSITY ANALYSIS OF THE ATOMIC GEOMETRY OF P(1X1) MONOLAYERS OF BISMUTH ON GAAS(110)
    DUKE, CB
    LESSOR, DL
    GUO, T
    FORD, WK
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (04): : 3412 - 3416
  • [5] ELASTIC LOW-ENERGY ELECTRON-DIFFRACTION FROM GAAS(110)-P(1X1)-SB(1 ML)
    KAHN, A
    CARELLI, J
    DUKE, CB
    PATON, A
    FORD, WK
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (03): : 775 - 777
  • [6] Comparative study of the reflectance difference spectrum from Si(001) using reflectance difference spectroscopy low-energy electron diffraction/scanning tunneling microscopy
    Lin, JL
    Jaloviar, SG
    Mantese, L
    Aspnes, DE
    McCaughan, L
    Lagally, MG
    DIAGNOSTIC TECHNIQUES FOR SEMICONDUCTOR MATERIALS PROCESSING II, 1996, 406 : 401 - 405
  • [7] Reactive growth of MgO overlayers on Fe(001) surfaces studied by low-energy electron diffraction and atomic force microscopy
    Tekiel, Antoni
    Fostner, Shawn
    Topple, Jessica
    Miyahara, Yoichi
    Gruetter, Peter
    APPLIED SURFACE SCIENCE, 2013, 273 : 247 - 252
  • [8] Reflectance anisotropy spectroscopy of Si(111)-(3 x 1)Li and Ag surfaces
    Jorgji, S.
    McGilp, J. F.
    Patterson, C. H.
    PHYSICAL REVIEW B, 2013, 87 (19)
  • [9] LOW-ENERGY ELECTRON-DIFFRACTION STUDY OF FE(110) .1. EXPERIMENTAL
    GAFNER, G
    FEDER, R
    SURFACE SCIENCE, 1976, 57 (01) : 37 - 44
  • [10] DYNAMICAL ANALYSIS OF LOW-ENERGY ELECTRON-DIFFRACTION INTENSITIES FROM GAAS(110)-P(1X1)-SB(1ML)
    DUKE, CB
    PATON, A
    FORD, WK
    KAHN, A
    CARELLI, J
    PHYSICAL REVIEW B, 1982, 26 (02): : 803 - 814