Study on degeneration of SIMOX structure by Rutherford backscattering spectrum

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作者：
Jiang, Meiping [1 ]
Li, Jinhua [1 ]
Lin, Chenglu [1 ]
机构：
[1] Jiangsu Inst of Petrochemical, Technology, Changzhou, China
来源：
Weixi Jiagong Jishu/Microfabrication Technology | 1996年 / 03期
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页码：25 / 30
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