Synthesis and Characterization of Device-Quality B-Doped Homoepitaxial Diamond Films

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作者
Yamanaka, Sadanori
Watanabe, Hideyuki
Masai, Shigeo
Sekiguchi, Takashi
Takeuchi, Daisuke
Okushi, Hideyo
Kajimura, Koji
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[1] Electrotechnical Laboratory, 1-1-4 Umezono, Tsukuba, Ibaraki 305-8568, Japan
[2] Faculty of Materials Sciences, University of Tsukuba, 1-1-1 Tennoudai, Tsukuba, Ibaraki 305-8573, Japan
[3] Department of Electronics, School of Engineering, Tokai University, 1117 Kitakaname, Hiratsuka, Kanagawa 259-1292, Japan
[4] Lab. for Physics of Crystal Defects, Institute for Materials Research, Tohoku University, 2-1-1 Katahira, Sendai 980-8577, Japan
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页码:118 / 121
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