ORIENTATION DEPENDENCE OF LATERAL SOLID-PHASE-EPITAXIAL GROWTH IN AMORPHOUS Si FILMS.

被引:0
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作者
Yamamoto, Hiroshi [1 ]
Ishiwara, Hiroshi [1 ]
Furukawa, Seijiro [1 ]
机构
[1] Tokyo Inst of Technology, Yokohama, Jpn, Tokyo Inst of Technology, Yokohama, Jpn
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摘要
SEMICONDUCTING SILICON
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页码:667 / 672
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