Calculation of a flux of sputtered atoms coming back on the target surface under its heterogeneous sputtering in a glow discharge plasma

被引：0

作者：

Bondarenko, G.G. ^{[1
]}

Kristya, V.I. ^{[1
]}

Prassitsky, V.V. ^{[1
]}

Khabibulin, R.I. ^{[1
]}

机构：

[1] Moscow State Inst of Electronics and, Mathematics, Moscow, Russia

来源：

Surface Investigation X-Ray, Synchrotron and Neutron Techniques | 1999年 / 14卷 / 11期

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学科分类号：

摘要：

Atoms

引用

页码：1539 / 1546

共 8 条

[1] Calculation of the Flow of Sputtered Atoms Returning to a Target with a Surface Relief during Sputtering in Glow Discharge
Kristya, V. I.
JOURNAL OF SURFACE INVESTIGATION-X-RAY SYNCHROTRON AND NEUTRON TECHNIQUES, 2008, 2 (02) : 203 - 206
[2] Calculation of the flow of sputtered atoms returning to a target with a surface relief during sputtering in glow discharge
V. I. Kristya
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques, 2008, 2 : 203 - 206
[3] Impact of an Ion-Flux Non-Uniformity on the Sputtering of a Target with a Surface Relief in a Glow Discharge Plasma
Kristya, V. I.
Tun, Ye Naing
JOURNAL OF SURFACE INVESTIGATION, 2013, 7 (02): : 295 - 298
[4] Influence of redeposition of sputtered atoms on distribution dynamics of their flux along the surface of a hollow cathode in glow discharge
Bondarenko, GG
Bonk, OG
Kristya, VI
Prasitskiy, VV
Habibulin, RI
IZVESTIYA AKADEMII NAUK SERIYA FIZICHESKAYA, 2000, 64 (04): : 752 - 755
[5] Calculation of ion and fast atom contributions to the sputtering non-uniformity of the target with a surface relief in glow discharge
Kristya V.I.
Tun Y.N.
Kristya, V. I. (kristya@bmstu-kaluga.ru), 1600, Izdatel'stvo Nauka (08): : 263 - 268
[6] Emission of plasma escaping from a heterogeneous solid (granite) under an electric discharge near its surface
Vettegren, V. I.
Shcherbakov, I. P.
Kuksenko, V. S.
Mamalimov, R. I.
PHYSICS OF THE SOLID STATE, 2014, 56 (09) : 1828 - 1832
[7] Emission of plasma escaping from a heterogeneous solid (granite) under an electric discharge near its surface
V. I. Vettegren
I. P. Shcherbakov
V. S. Kuksenko
R. I. Mamalimov
Physics of the Solid State, 2014, 56 : 1828 - 1832
[8] Calculation of the ion current distribution along the cathode in glow discharge under the existence of a periodic relief and an insulating film of varying thickness on its surface
Bondarenko, G. G.
Kristya, V. I.
XII INTERNATIONAL CONFERENCE RADIATION-THERMAL EFFECTS AND PROCESSES IN INORGANIC MATERIALS, 2017, 168

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