A three-dimensional numerical method for thermal analysis in X-ray lithography

被引：0
|
作者：
Dai, W. [1 ]
Nassar, R. [1 ]
机构：
[1] Mathematics and Statistics, College of Engineering and Science, Louisiana Tech. University, Ruston, United States
来源：
International Journal of Numerical Methods for Heat and Fluid Flow | 1998年 / 8卷 / 04期
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摘要：
(Edited Abstract)
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页码：409 / 423
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