Magnetic Shielding of an Electron Microscope.

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作者
Pejas, W.
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Optik (Jena) | 1978年 / 50卷 / 01期
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摘要
An unround electron-optical corrector is very susceptible to disturbances by magnetic fields. Methods to shield the corrector from magnetic fields are discussed. A resolution limit less than 1 A seems to be possible.
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页码:61 / 72
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