共 50 条
- [3] Characterization of low-dielectric-constant methylsiloxane spin-on-glass films JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2000, 39 (3A): : 1070 - 1073
- [4] Characterization of low-dielectric-constant methylsiloxane spin-on-glass films Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 2000, 39 (3 A): : 1070 - 1073
- [6] Low dielectric constant glass/ceramic composites INDUSTRIAL CERAMICS, 2003, 23 (02): : 127 - 132
- [7] Low-dielectric-constant nonporous fluorocarbon films for interlayer dielectric Japanese Journal of Applied Physics, 2008, 47 (4 PART 2): : 2515 - 2520
- [10] Fluorinated Amorphous Carbon as a Low-Dielectric-Constant Interlayer Dielectric MRS Bulletin, 1997, 22 : 55 - 58