Dynamic control of reactive magnetron sputtering. A theoretical analysis

被引：0
|
作者：
Spencer, A.G. [1 ]
Howson, R.P. [1 ]
机构：
[1] Loughborough Consultants Ltd, United Kingdom
来源：
Thin Solid Films | 1990年 / 186卷 / 01期
关键词：
Sputtering;
D O I：
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中图分类号：
学科分类号：
摘要：
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页码：129 / 136
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