共 50 条
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- [4] Investigation of multipolar electron cyclotron resonance plasma source sensors and models for plasma control Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1996, 14 (3 pt 2):
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- [9] Effect of electric field on electron cyclotron resonance plasma etching JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1995, 34 (11): : 5998 - 6002
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