Ion beam deposition and surface characterization of thin multi-component oxide films during growth

被引：0
|
作者：
Krauss, A.R. [1 ]
Im, J. [1 ]
Smentkowski, V. [1 ]
Schultz, J.A. [1 ]
Auciello, O. [1 ]
Gruen, D.M. [1 ]
Holocek, J. [1 ]
Chang, R.P.H. [1 ]
机构：
[1] Argonne Natl Lab, Argonne, United States
来源：
Materials Science and Engineering A | 1998年 / A253卷 / 1-2期
关键词：
Number:; F33615-97-C-1035; Acronym:; -; Sponsor:; DAAL03-92-C-0002; USDOE; Sponsor: U.S. Department of Energy; 9405001; W-31-109-ENG-38; BES; Sponsor: Basic Energy Sciences; SBIR; Sponsor: Small Business Innovation Research;
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页码：221 / 233
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