A study of the thermalization and diffusion of flows of sputtered atoms in gases

被引：0
|
作者：
Vol'pyas, V. A.
Gol'man, E. K.
Tsukerman, M. A.
机构：
来源：
Zhurnal Tekhnicheskoi Fiziki | 1996年 / 41卷 / 04期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [1] THERMALIZATION OF SPUTTERED ATOMS
    MEYER, K
    SCHULLER, IK
    FALCO, CM
    JOURNAL OF APPLIED PHYSICS, 1981, 52 (09) : 5803 - 5805
  • [2] Thermalization of sputtered aluminium atoms in an electron cyclotron resonance plasma source
    Poluektov, NP
    Kharchenko, VN
    Kamyschov, IA
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 2003, 12 (03): : 449 - 453
  • [3] MONTE-CARLO SIMULATION OF THE THERMALIZATION OF SPUTTERED ATOMS AND REFLECTED ATOMS IN THE MAGNETRON SPUTTERING DISCHARGE
    YAMAMURA, Y
    ISHIDA, M
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1995, 13 (01): : 101 - 112
  • [4] On the anisotropy and thermalization of the metal sputtered atoms in a low-pressure magnetron discharge
    de Poucques, L.
    Vitelaru, C.
    Minea, T. M.
    Bretagne, J.
    Popa, G.
    EPL, 2008, 82 (01)
  • [5] EVOLUTION TOWARDS THERMALIZATION, AND DIFFUSION, OF SPUTTERED PARTICLE FLUXES - SPATIAL PROFILES
    VALLESABARCA, JA
    GRASMARTI, A
    JOURNAL OF APPLIED PHYSICS, 1984, 55 (05) : 1370 - 1378
  • [6] DIFFUSION OF METASTABLE ATOMS OF NOBLE GASES
    LISITSYN, VN
    PROVOROV, AS
    CHEBOTAEV, VP
    OPTICS AND SPECTROSCOPY-USSR, 1970, 29 (02): : 119 - +
  • [7] INVESTIGATION OF THE THERMALIZATION OF SPUTTERED ATOMS IN A MAGNETRON DISCHARGE USING LASER-INDUCED FLUORESCENCE
    PARK, WZ
    EGUCHI, T
    HONDA, C
    MURAOKA, K
    YAMAGATA, Y
    JAMES, BW
    MAEDA, M
    AKAZAKI, M
    APPLIED PHYSICS LETTERS, 1991, 58 (22) : 2564 - 2566
  • [8] MONTE-CARLO CALCULATION OF THE THERMALIZATION OF ATOMS SPUTTERED FROM THE CATHODE OF A SPUTTERING DISCHARGE
    TURNER, GM
    FALCONER, IS
    JAMES, BW
    MCKENZIE, DR
    JOURNAL OF APPLIED PHYSICS, 1989, 65 (09) : 3671 - 3679
  • [9] Thermalization of the flow of sputtered target atoms during ion-plasma deposition of films
    Volpyas, Valery A.
    Komlev, Andrey Y.
    Platonov, Roman A.
    Kozyrev, Andrey B.
    PHYSICS LETTERS A, 2014, 378 (43) : 3182 - 3184
  • [10] Thermalization of suprathermal N(4S) atoms in He and Ar gases
    Zhang, P.
    Kharchenko, V.
    Dalgarno, A.
    MOLECULAR PHYSICS, 2007, 105 (11-12) : 1487 - 1496
12345