Extreme-ultraviolet phase-shifting point-diffraction interferometer: A wave-front metrology tool with subangstrom reference-wave accuracy

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Appl Opt | / 35卷 / 7252期
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  • [1] Extreme-ultraviolet phase-shifting point-diffraction interferometer: A wave-front metrology tool with subangstrom reference-wave accuracy
    Center for X-Ray Optics, Lawrence Berkeley Natl. Laboratory, Berkeley, CA 94720, United States
    不详
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